Hot Paper - Highly sensitive and fast response strain sensor based on evanescently coupled micro/nanofibers

Highly sensitive and fast response strain sensor based on evanescently coupled micro/nanofibers

基于渐逝耦合微/纳米纤维的高灵敏度和快速响应应变传感器
エバネッセント結合マイクロ/ナノファイバーに基づく高感度で高速応答のひずみセンサー
소멸 결합된 마이크로/나노 섬유를 기반으로 한 고감도 및 빠른 응답 스트레인 센서
Sensor de deformación de alta sensibilidad y respuesta rápida basado en micro/nanofibras acopladas evanescentemente
Capteur de contrainte très sensible et à réponse rapide basé sur des micro/nanofibres à couplage évanescent
Высокочувствительный и быстродействующий тензометрический датчик на основе быстросоединенных микро/нановолокон

Wen Yu 余文 ¹, Ni Yao ², Jing Pan 潘婧 ¹, Wei Fang 方伟 ¹, Xiong Li ³, Limin Tong 童利民 ¹, Lei Zhang 张磊 ¹ ²

¹ State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China
中国杭州浙江大学光电科学与工程学院现代光学仪器国家重点实验室
² Research Center for Intelligent Sensing, Zhejiang Lab, Hangzhou 311121, China
中国杭州之江实验室智智能感知研究院
³ Tencent Robotics X Lab, Tencent Technology (Shenzhen) Co. Ltd, Shenzhen 518054, China
中国深圳腾讯科技（深圳）有限公司腾讯Robotics X实验室

https://doi.org/10.29026/oea.2022.210101

https://www.oejournal.org/article/doi/10.29026/oea.2022.210101

Opto-Electronic Advances, 15 July 2022

Abstract

Flexible strain sensors play an important role in electronic skins, wearable medical devices, and advanced robots. Herein, a highly sensitive and fast response optical strain sensor with two evanescently coupled optical micro/nanofibers (MNFs) embedded in a polydimethylsiloxane (PDMS) film is proposed. The strain sensor exhibits a gauge factor as high as 64.5 for strain ≤ 0.5% and a strain resolution of 0.0012% which corresponds to elongation of 120 nm on a 1 cm long device.

As a proof-of-concept, highly sensitive fingertip pulse measurement is realized. The properties of fast temporal frequency response up to 30 kHz and a pressure sensitivity of 102 kPa−1 enable the sensor for sound detection. Such versatile sensor could be of great use in physiological signal monitoring, voice recognition and micro-displacement detection.

Reviews and Discussions