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Optical near-field imaging and nanostructuring by means of laser ablation
通过激光烧蚀的光学近场成像和纳米结构
レーザーアブレーションによる光学近接場イメージングとナノ構造化
레이저 절제를 통한 광학 근거리장 이미징 및 나노구조화
Imágenes ópticas de campo cercano y nanoestructuración mediante ablación láser
Imagerie optique en champ proche et nanostructuration par ablation laser
Оптическая визуализация ближнего поля и наноструктурирование с помощью лазерной абляции
Johannes Boneberg, Paul Leiderer
Department of Physics, University of Konstanz, Konstanz 78457, Germany
Opto-Electronic Science, 25 November 2021
Abstract

In this review we consider the development of optical near-field imaging and nanostructuring by means of laser ablation since its early stages around the turn of the century. The interaction of short, intense laser pulses with nanoparticles on a surface leads to laterally tightly confined, strongly enhanced electromagnetic fields below and around the nano-objects, which can easily give rise to nanoablation. This effect can be exploited for structuring substrate surfaces on a length scale well below the diffraction limit, one to two orders smaller than the incident laser wavelength.

We report on structure formation by the optical near field of both dielectric and metallic nano-objects, the latter allowing even stronger and more localized enhancement of the electromagnetic field due to the excitation of plasmon modes. Structuring with this method enables one to nanopattern large areas in a one-step parallel process with just one laser pulse irradiation, and in the course of time various improvements have been added to this technique, so that also more complex and even arbitrary structures can be produced by means of nanoablation.

The near-field patterns generated on the surface can be read out with high resolution techniques like scanning electron microscopy and atomic force microscopy and provide thus a valuable tool—in conjunction with numerical calculations like finite difference time domain (FDTD) simulations—for a deeper understanding of the optical and plasmonic properties of nanostructures and their applications.
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