Surface-patterned chalcogenide glasses with high-aspect-ratio microstructures for long-wave infrared metalenses
用于长波红外金属透镜的高纵横比微结构表面图案化硫族玻璃
長波赤外線金属レンズ用の高アスペクト比微細構造表面パターン化カルコゲンガラス
장파 적외선 금속 렌즈에 사용되는 고종횡비 미구조 표면 도안화 유황족 유리
Vidrio sulfuroso patrón de superficie de microestructura de alta relación vertical y horizontal para lentes metálicas infrarrojas de onda larga
Verre sulfurique à motif de surface microstructuré à rapport d'aspect élevé pour lentilles métalliques infrarouges à ondes longues
Картирование поверхности микроструктуры с высоким соотношением сторон для длинноволновых инфракрасных металлических линз
¹ Laboratory of Infrared Materials and Devices, Research Institute of Advanced Technologies, Ningbo University, Ningbo 315211, China
中国 宁波 宁波大学宁波高等技术研究院 红外材料及器件实验室
² Zhejiang Key Laboratory of Advanced Optical Functional Materials and Devices, Ningbo 315211, China
中国 宁波 全省先进光功能材料及器件重点实验室
³ Advanced Optics & Photonics Laboratory, Department of Engineering, School of Science and Technology, Nottingham Trent University, Nottingham NG11 8NS, United Kingdom
⁴ Faculty of Electrical Engineering and Computer Science, Ningbo University, Ningbo 315211, China
中国 宁波 宁波大学 信息科学与工程学院
⁵ State Key Laboratory of Extreme Photonics and Instrumentation, College of Optical Science and Engineering; International Research, Center for Advanced Photonics, Zhejiang University, Hangzhou 310027, China
中国 杭州 浙江大学 先进光子学国际研究中心 极端光学技术与仪器全国重点实验室
⁶ Ningbo Institute of Oceanography, Ningbo 315832, China
中国 宁波 宁波海洋研究院
Multidimensional-engineering chalcogenide glasses is widely explored to construct various infrared photonic devices, with their surface as a key dimension for wavefront control. Here, we demonstrate direct patterning high-aspect-ratio microstructures on the surface of chalcogenide glasses offers an efficient and robust method to manipulate longwave infrared radiations.
Despite chalcogenide glass being considered soft in terms of its mechanical properties, we successfullyfabricate high-aspect-ratio micropillars with a height of 8 μm using optimized deep etching process, and we demonstrate a 2-mm-diameter all-chalcogenide metalens with a numerical aperture of 0.45 on the surface of a 1.5-mm-thick As₂Se₃ glass.
Leveraging the exceptional longwave infrared (LWIR) transparency and moderate refractive index of As₂Se₃ glass, the all-chalcogenide metalens produces a focal spot size of ~1.39λ₀ with a focusing efficiency of 47% at the wavelength of 9.78 μm, while also exhibiting high-resolution imaging capabilities. Our work provides a promising route to realize easy-to-fabricate, mass-producible planar infrared optics for compact, light-weight LWIR imaging systems.
