Three-dimensional measurement enabled by single-layer all-in-one transmitting-receipting optical metasystem
单层一体式收发光学元系统实现三维测量
単層オールインワン送信受信光学メタシステムによる3次元測定
단층 올 인 원 전송 수신 광학 메타시스템으로 가능한 3차원 측정
Medida tridimensional habilitada por un metasistema óptico de transmisión-recepción todo en uno de capa única
Mesure tridimensionnelle par métasystème optique émetteur-récepteur tout-en-un à couche unique
Трехмерное измерение с помощью однослойной оптической метасистемы передачи-приема "все в одном"
Xiaoli Jing ¹ ², Qiming Liao ¹, Misheng Liang ², Bo Wang ³, Junjie Li ³, Yongtian Wang ¹, Rui You ², Lingling Huang ¹
¹ Beijing Engineering Research Center of Mixed Reality and Advanced Display, School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China
中国 北京 北京理工大学光电学院 北京市混合现实与新型显示工程技术研究中心
² Laboratory of Intelligent Microsystems, Beijing Information Science and Technology University, Beijing 100191, China
中国 北京 北京信息科技大学智能微系统实验室
³ Beijing National Laboratory for Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100191, China
中国 北京 中国科学院物理研究所 北京凝聚态物理国家实验室
Optical three-dimensional (3D) measurement is a critical tool in micro-nano manufacturing, the automotive industry, and medical technology due to its nondestructive nature, high precision, and sensitivity. However, passive light field system still requires a refractive primary lens to collect light of the scene, and structured light can not work well with the highly refractive object.
Meta-optics, known for being lightweight, compact, and easily integrable, has enabled advancements in passive metalens-array light fields and active structured light techniques. Here, we propose and experimentally validate a novel 3D measurement metasystem. It features a transmitting metasurface generating chromatic line focuses as depth markers and a symmetrically arranged receiving metasurface collecting depth-dependent spectral responses.
A lightweight, physically interpretable algorithm processes these data to yield high-precision depth information efficiently. Experiments on metallic and wafer materials demonstrate a depth accuracy of ±20 µm and lateral accuracy of ±10 µm. This single-layer optical metasystem, characterized by simplicity, micro-level accuracy, easy installation and scalability, shows potential for diverse applications, including process control, surface morphology analysis, and production measurement.
