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Three-dimensional isotropic microfabrication in glass using spatiotemporal focusing of high-repetition-rate femtosecond laser pulses
利用高重复率飞秒激光脉冲时空聚焦实现玻璃三维各向同性微加工
高繰返し速度フェムト秒レーザパルスによる空間集束によるガラスの三次元等方性微細加工
고중복률 비초 레이저 펄스 시공 초점을 이용하여 유리 3차원 각방향 동성 미세 가공을 실현하다
Micromecánica isotrópica tridimensional de vidrio con enfoque espacio - temporal de pulsos láser femtosegundos de alta tasa de repetición
Micro - usinage isotrope tridimensionnel du verre avec focalisation espace - temps pulsée par Laser femtoseconde à haut taux de répétition
Использование высокоповторяющихся фемтосекундных лазерных импульсов пространственно - временной фокусировки для достижения трехмерной изотропной микрообработки стекла
Yuanxin Tan 谭远鑫 ¹ ³ ⁴, Haotian Lv 吕浩天 ¹, Jian Xu 徐剑 ², Aodong Zhang 张傲东 ², Yunpeng Song 宋云鹏 ², Jianping Yu 于建平 ², Wei Chen 陈蔚 ², Yuexin Wan 万悦芯 ², Zhaoxiang Liu 刘招祥 ², Zhaohui Liu 刘朝辉 ², Jia Qi 齐家 ², Yangjian Cai 蔡阳健 ¹ ³ ⁴, Ya Cheng 程亚 ² ³
¹ Shandong Provincial Engineering and Technical Center of Light Manipulations & Shandong Provincial Key Laboratory of Optics and Photonic Device, School of Physics and Electronics, Shandong Normal University, Jinan 250014, China
中国 济南 山东师范大学物理与电子科学学院 光场调控及应用中心 山东省光学与光子器件技术重点实验室
² XXL—The Extreme Optoelectromechanics Laboratory, School of Physics and Electronics Science, East China Normal University, Shanghai 200241, China
中国 上海 华东师范⼤学物理与电⼦科学学院 极端光机电实验室
³ Joint Research Center of Light Manipulation Science and Photonic Integrated Chip of East China Normal University and Shandong Normal University, East China Normal University, Shanghai 200241, China
中国 上海 华东师范大学和山东师范大学 光场调控科学与光子芯片器件联合研究中心
⁴ Collaborative Innovation Center of Light Manipulation and Applications, Shandong Normal University, Jinan 250358, China
中国 济南 山东师范大学光场调控及应用中心
Opto-Electronic Advances, 31 October 2023
Abstract

To improve the processing efficiency and extend the tuning range of 3D isotropic fabrication, we apply the simultaneous spatiotemporal focusing (SSTF) technique to a high-repetition-rate femtosecond (fs) fiber laser system. In the SSTF scheme, we propose a pulse compensation scheme for the fiber laser with a narrow spectral bandwidth by building an extra-cavity pulse stretcher.

We further demonstrate truly 3D isotropic microfabrication in photosensitive glass with a tunable resolution ranging from 8 µm to 22 µm using the SSTF of fs laser pulses. Moreover, we systematically investigate the influences of pulse energy, writing speed, processing depth, and spherical aberration on the fabrication resolution.

As a proof-of-concept demonstration, the SSTF scheme was further employed for the fs laser-assisted etching of complicated glass microfluidic structures with 3D uniform sizes. The developed technique can be extended to many applications such as advanced photonics, 3D biomimetic printing, micro-electromechanical systems, and lab-on-a-chips.
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