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Acousto-optic scanning multi-photon lithography with high printing rate
高印刷率声光扫描多光子光刻
高印刷率音響光学走査多光子リソグラフィ
높은 인쇄율 음광 스캐닝 다광자 광각
Litografía multiphotón de escaneo acústico de alta velocidad de impresión
Lithographie multiphotonique à balayage Acousto - optique à haut taux d'impression
многофотонная литография
Minghui Hong 洪明辉
Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen 361005, China
中国 厦门 厦门大学萨本栋微米纳米科学技术研究院
Opto-Electronic Advances, 26 February 2024
Abstract

Acousto-optic scanning and spatial switching methods have revolutionized printing rate improvements for multi-photon lithography.
Opto-Electronic Advances_1
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